JPH0576561B2 - - Google Patents

Info

Publication number
JPH0576561B2
JPH0576561B2 JP13291484A JP13291484A JPH0576561B2 JP H0576561 B2 JPH0576561 B2 JP H0576561B2 JP 13291484 A JP13291484 A JP 13291484A JP 13291484 A JP13291484 A JP 13291484A JP H0576561 B2 JPH0576561 B2 JP H0576561B2
Authority
JP
Japan
Prior art keywords
feed screw
nut
leaf springs
carriage
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13291484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113101A (ja
Inventor
Yukio Okita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP59132914A priority Critical patent/JPS6113101A/ja
Publication of JPS6113101A publication Critical patent/JPS6113101A/ja
Publication of JPH0576561B2 publication Critical patent/JPH0576561B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission Devices (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP59132914A 1984-06-29 1984-06-29 送り機構 Granted JPS6113101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59132914A JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59132914A JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Publications (2)

Publication Number Publication Date
JPS6113101A JPS6113101A (ja) 1986-01-21
JPH0576561B2 true JPH0576561B2 (en]) 1993-10-22

Family

ID=15092469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59132914A Granted JPS6113101A (ja) 1984-06-29 1984-06-29 送り機構

Country Status (1)

Country Link
JP (1) JPS6113101A (en])

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62241633A (ja) * 1986-04-11 1987-10-22 Hiihaisuto Seiko Kk 直線送り機構
JPS62261090A (ja) * 1986-05-07 1987-11-13 株式会社ニコン 移動部材の送り装置
JPS6383446A (ja) * 1986-09-25 1988-04-14 Agency Of Ind Science & Technol ねじ送り装置におけるナツトホルダ
JPS63290988A (ja) * 1987-05-22 1988-11-28 日立電子エンジニアリング株式会社 ステージ移動機構
JP2884165B2 (ja) * 1988-08-26 1999-04-19 西部電機株式会社 送りねじ支持機構
JP2572853B2 (ja) * 1989-08-01 1997-01-16 株式会社ミツトヨ 測定機
JPH0386238U (en]) * 1989-12-25 1991-08-30
JP2550741B2 (ja) * 1990-03-20 1996-11-06 日本精工株式会社 スライドテーブル機構
JP5020504B2 (ja) * 2005-11-25 2012-09-05 ヒーハイスト精工株式会社 調整装置及び調整システム
JP4874148B2 (ja) * 2007-03-29 2012-02-15 株式会社アイエイアイ アクチュエータ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5474774A (en) * 1977-11-26 1979-06-15 Tokyo Seimitsu Co Ltd Machine for measuring coordinates
JPS585208Y2 (ja) * 1978-02-22 1983-01-28 株式会社三豊製作所 摺動部材の微動装置
JPS56121105U (en]) * 1981-01-27 1981-09-16

Also Published As

Publication number Publication date
JPS6113101A (ja) 1986-01-21

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